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Turbomolecular Pump Product List

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Vacuum solutions for coating processes

Edwards has extensive experience in many thin film processes, including vacuum deposition, sputtering, CVD, and plasma polymerization.

This catalog introduces vacuum solutions related to the coating process. The coating process involves depositing metals, inorganic compounds, and organic compounds to form thin films for various applications. Vacuum pumps are used to prevent contamination of impurities during the process, improve film formation speed, and for plasma generation applications. Edwards provides packaged solutions based on extensive knowledge of applications and processes derived from past installation achievements. *For more details, please refer to the PDF document or feel free to contact us.*

  • Other pumps
  • Vacuum pump
  • Positive Displacement Pump
  • Turbomolecular Pump

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Magnetic Bearing Type Composite Molecular Pump (TG-M Series)

Wide-range exhaust: It supports exhaust from low to ultra-high vacuum across a wide range.

In addition to standard and chemical types, we also offer various special specifications (ultra-low vibration, reaction product countermeasure specifications, ultra-high vacuum specifications, radiation-resistant specifications)!

  • Vacuum pump
  • Turbo Pump
  • Turbomolecular Pump

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