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Turbomolecular Pump(CVD) - List of Manufacturers, Suppliers, Companies and Products

Turbomolecular Pump Product List

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Vacuum solutions for coating processes

Vacuum solutions for coating processes

Edwards has extensive experience in many thin film processes, including vacuum deposition, sputtering, CVD, and plasma polymerization.

This catalog introduces vacuum solutions related to the coating process. The coating process involves depositing metals, inorganic compounds, and organic compounds to form thin films for various applications. Vacuum pumps are used to prevent contamination of impurities during the process, improve film formation speed, and for plasma generation applications. Edwards provides packaged solutions based on extensive knowledge of applications and processes derived from past installation achievements. *For more details, please refer to the PDF document or feel free to contact us.*

  • Other pumps
  • Vacuum pump
  • Positive Displacement Pump

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Digital Magnetic Bearing Turbo Molecular Pump UTM-FH/FW Series

Digital Magnetic Bearing Turbo Molecular Pump UTM-FH/FW Series

Possible response to centralized management systems through digitalization. [ULVAC]

This is a turbo molecular pump with a composite wing design that employs digital 5-axis controlled magnetic bearings. The UTM-FH and UTM-FW achieve advantages such as high functionality, high reliability, and energy-saving capabilities due to the adoption of digital 5-axis controlled magnetic bearings. The FH series is designed for light to middle processes with high back pressure and high compression ratios, while the FW series is suitable for wide-range, high-flow applications for high-load processes and middle to hard processes. 【Features】 ○ Equipped with monitoring and self-diagnosis functions, as well as communication capabilities, enabling compatibility with centralized management systems through digitalization. ○ Incorporates a coupling-free system, allowing operation in combination with registered pump bodies using a single power supply by switching models. ○ Features a speed variable system, allowing exhaust speed to be adjusted within a range of 25% to 100%. ○ With excellent corrosion-resistant surface treatment, special surface treatment and internal heating systems are available as options for more demanding processes (FW series). ○ Adopts a destructive energy absorption structure, designed for high safety by minimizing equipment damage during malfunctions. For more details, please contact us or download the catalog.

  • Vacuum pump

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